The Smart MEMs Piezo based energy Harvesting with Integrated Supercapacitor and packaging

The smart-MEMPHIS project combines the forces of nine European companies, universities and research institutes to establish a new, European competitive ecosystem in the field of energy autonomous smart sensor systems, building European leadership in microsystems sector.

© LivaNova. Reproduced with permission

© LivaNova. Reproduced with permission

The goal is to tackle the main challenge for all smart devices – self-powering. The project aims to design, manufacture and test a miniaturized autonomous energy supply based on harvesting vibrational energy with piezo-MEMS energy harvesters. The project will integrate several multi-functional technologies and nanomaterials; a MEMS-based multi-axis energy harvester, an ultra-low-power ASIC to manage the variations of the frequency and harvested power, and a miniaturized energy storing supercapacitor, all heterogeneously integrated for cost effective 3D integration.

The energy harvesting device will be demonstrated in two very demanding and different applications: a leadless pacemaker, shown above, and a wireless sensor network for structural health monitoring. See objectives.