Full wafer poling set up for PZT MEMS

aixACCT had built a full wafer poling set up, which allows to pole PZT materials in order to tune the PZT performance. aixACCT has realized a prototype that offers a technology which quite softly but securely contacts all top electrodes in parallel and all bottom electrode contacts in parallel to a pad size of 200µm x 200µm. The clue is the integrated current limitation which is essential for this technology in order to pole all devices even if a single device fails. Read more

Posted on January 14, 2019 .