World first direct measurement of piezoelectric parameter e31,f

e31,f is the most important parameter to characterize the properties of a piezoelectric film. Before smart-MEMPHIS project started it has not been possible to measure this parameter directly as non-destructive testing on a full wafer. Using a bending plate principle aixACCT has demonstrated this direct measurement. The direct measurement has been compared to two indirect methods. One is double beam laser interferometry which uses two d33,f measurements on different pad sized to calculate e31,f and to cantilever deflection measurement which can be used to calculate e31,f. Read more

Posted on January 14, 2019 .